FP-260GZS

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    • Description
    • Features
    • Applications
    • Specifications
    • Gases
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    This model is a highly sensitive C5F8 / C4F6 / or C3F6 gas monitor which uses a special techniquie for detecting C5F8, C4F6 or C3F6. into more readily detectable compounds.

    Then, the resulting compounds cause a chemical reaction on a colorimetric tape, and the intensity of the chemical reaction is analyzed and correlated to a specific ppm level of C5F8, C4F6 or C3F6 present in the sample. The detection tape is in a handy cassette which is easily removed for periodic replacement.



    • Ideal for monitoring semiconductor fab clean rooms
    • Ideal for low gas concentration
    • Minimal interference from solvents such as Fluorinert and Galden
    • Easily replaceable plug-in tape cassette
    • Cassette tape remainder display included
    • Environmental Monitoring
    • Semiconductor Fabs
    • Manufacturing
    • Detecting uncaptured gas from scrubber

    Model

    FP-260AGZS

    StructureDesktop type, transportable

    Detection principle

    Special pyrolyzer + Photoelectric photometry method using tape cassette

    Detection tape

    Plug in cassette

    Detection cycle

    20 seconds

    Measuring gas and range

    see table above

    Accuracy

    Within +/- 20% +1 of indication

    Tape operation time

    1 month (for gas free condition) Tape remainder display and caution display for end of tape.

    Sampling method

    Automatic sampling (1 l/min) with internal pump

    Gas Concentration readout

    Direct reading with digital display

    Alarm Preset Levels

    Warning: 2.0ppm, Alarm 4.0ppm

    Alarm Accuracy

    Better than +/- 30% +1 digit of alarm setting value at constant condition

    Alarm Display

    Warning: Blinking yellow light
    Alarm: Blinking red light
    (steady light after restart)

    Relay Contact

    Latched mode (standard) or non-latched mode (optional). Form C (dry contacts) for both warning and alarm.
    Rated 0.5A at 125VAC.

    Alarm functions

    Latching (standard) or self reset. Lamp (Caution: Yellow, Warning: Red) and buzzer

    Self diagnosis

    Sensor failure, low flow, tape failure, tape cut, tape replacement, tape end, tape failure, tape set failure, system trouble, motor trouble. Output: Form C, dry contacts
    non-latched mode, rated 0.5A at 125VAC

    External output signal

    4-20mA DC (0-1V DC optional)
    BL-NET (optional)

    Operating temperature & humidity

    10~35°C, 30~60% RH (non condensing)

    Gas Inlet

    Outer diameter: 6mm, with fitting for PTFE tubing

    Power supply & power

    110VAC, 110 VAC, 115VAC, 220VAC (80VA)

    Dimensions & weight

    Approx. 275(W) x 220(H) x 370(D)mm
    Approx. 12 kg

    Standard Accessories

    Gas detection cassette tape, Dust filter, Fuse (3A)

    Gas

    Detection Range
    Resolution
    Warning
    Alarm
    Detection Cycle
    Tape No.

    C5F8

    0~5.0ppm
    0.1ppm
    2.0ppm
    4.0ppm
    20 sec
    FV-017

    C4F6

    0-5ppm
    0.1ppm
    2.0ppm
    4.0ppm
    20 sec
    FV-017

    C3F6

    0~3.0ppm
    0.1ppm
    0.9ppm
    2.0ppm
    20 sec
    FV-117