FP-260GZS
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This model is a highly sensitive C5F8 / C4F6 / or C3F6 gas monitor which uses a special techniquie for detecting C5F8, C4F6 or C3F6. into more readily detectable compounds.
Then, the resulting compounds cause a chemical reaction on a colorimetric tape, and the intensity of the chemical reaction is analyzed and correlated to a specific ppm level of C5F8, C4F6 or C3F6 present in the sample. The detection tape is in a handy cassette which is easily removed for periodic replacement.
- Ideal for monitoring semiconductor fab clean rooms
- Ideal for low gas concentration
- Minimal interference from solvents such as Fluorinert and Galden
- Easily replaceable plug-in tape cassette
- Cassette tape remainder display included
- Environmental Monitoring
- Semiconductor Fabs
- Manufacturing
- Detecting uncaptured gas from scrubber
Model | FP-260AGZS |
| Structure | Desktop type, transportable |
Detection principle | Special pyrolyzer + Photoelectric photometry method using tape cassette |
Detection tape | Plug in cassette |
Detection cycle | 20 seconds |
Measuring gas and range | see table above |
Accuracy | Within +/- 20% +1 of indication |
Tape operation time | 1 month (for gas free condition) Tape remainder display and caution display for end of tape. |
Sampling method | Automatic sampling (1 l/min) with internal pump |
Gas Concentration readout | Direct reading with digital display |
Alarm Preset Levels | Warning: 2.0ppm, Alarm 4.0ppm |
Alarm Accuracy | Better than +/- 30% +1 digit of alarm setting value at constant condition |
Alarm Display | Warning: Blinking yellow light Alarm: Blinking red light (steady light after restart) |
Relay Contact | Latched mode (standard) or non-latched mode (optional). Form C (dry contacts) for both warning and alarm. Rated 0.5A at 125VAC. |
Alarm functions | Latching (standard) or self reset. Lamp (Caution: Yellow, Warning: Red) and buzzer |
Self diagnosis | Sensor failure, low flow, tape failure, tape cut, tape replacement, tape end, tape failure, tape set failure, system trouble, motor trouble. Output: Form C, dry contacts non-latched mode, rated 0.5A at 125VAC |
External output signal | 4-20mA DC (0-1V DC optional) BL-NET (optional) |
Operating temperature & humidity | 10~35°C, 30~60% RH (non condensing) |
Gas Inlet | Outer diameter: 6mm, with fitting for PTFE tubing |
Power supply & power | 110VAC, 110 VAC, 115VAC, 220VAC (80VA) |
Dimensions & weight | Approx. 275(W) x 220(H) x 370(D)mm Approx. 12 kg |
Standard Accessories | Gas detection cassette tape, Dust filter, Fuse (3A) |
Gas | Detection Range | Resolution | Warning | Alarm | Detection Cycle | Tape No. |
C5F8 | 0~5.0ppm | 0.1ppm | 2.0ppm | 4.0ppm | 20 sec | FV-017 |
C4F6 | 0-5ppm | 0.1ppm | 2.0ppm | 4.0ppm | 20 sec | FV-017 |
C3F6 | 0~3.0ppm | 0.1ppm | 0.9ppm | 2.0ppm | 20 sec | FV-117 |
